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DIST libmodbus-3.1.6.tar.gz 479565 BLAKE2B d9aecb57a0dd274c54a62f707c90c83f31500dd76aefc38c2615d9ce32df659613511e1b567cc385fd2b05aa473dbfbb65ae248d93bb7df2fbfcd7b16b7c5701 SHA512 2e39aea41b1cfb30239c3d8271c68841d645a44a15019090e2efd16979bde373c76532f992aa6a4587b95c65ed9829705f32e698e445df7c0e1d52d0d1165bce